Processing and Characterization of Piezoelectric Materials into MicroElectroMechanical Systems
نویسنده
چکیده
The Pb(Zr, Ti)O3 (PZT) based micro electro mechanical systems are presented. Piezoelectric effect, basic piezoelectric equations are explained. Lost silicon mold process for PZT microstructures, PZT thin film deposition, and PZT based piezoelectric micromachined switch device are discussed.
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